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Technology of making freestanding gallium nitride (GaN) wafers has been matured at length. Gallium nitride is rigid but fragile. Chamfering of a periphery of a GaN wafer is difficult. At present edges are chamfered by a rotary whetstone of gross granules with weak pressure. Minimum roughness of the chamfered edges is still about Ra 10 μm to Ra 6 μm.
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Nov 07, 2013· This invention is also applicable to other nitride semiconductor wafers of aluminum nitride (AlN) or indium nitride (InN) besides GaN. SUMMARY OF THE INVENTION. The present invention proposes a nitride semiconductor wafer having an edge bevelled to roughness Ra smaller than Ra5 μm but larger than Ra10 nm (10 nm≦Ra≦5 μm).
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The difference in the etching characteristics of Ga- and N-polar materials has been examined in a number of studies. Palacios et al. showed only nitrogen polar MBE GaN epilayers were etched in aqueous KOH between 26 and 80 °C. Etching produced triangular shaped pyramids limited by {1 1 2 ¯ 1} planes, as shown in Fig. 2, while no etching of Ga-polar crystals occurred under the same etching
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